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"She played like she had nothing to lose, and it's dangerous to play those kind of players," Sharapova said. "I didn't really feel great out there today, but I did a very good job at the end."
Jamea Jackson unraveled after a fast start, winning only two points in the second set as No. 5 Nadia Petrova beat her 4-6, 6-0, 6-0.
No. 13 Daniela Hantuchova and No. 15 Elena Likhovtseva also lost. Qualifier Eleni Daniilidou, a semifinalist in 2004, beat Hantuchova 6-3, 4-6, 6-2, and No. 21 Ai Sugiyama rallied past Likhovtseva 3-6, 7-5, 6-0.
Meghann Shaughnessy, who upset Henin-Hardenne in the second round, was eliminated by No. 32 Sofia Arvidsson 5-7, 6-3, 7-6 (5).
In men's play, No. 3 David Nalbandian won the final 11 games to rally past Tomas Berdych 6-7 (3), 6-1, 6-0.
Berdych, seeded 26th, appeared poised for an upset bid when he played a nearly flawless tiebreaker to win the first set. But he committed 26 unforced errors in the final two sets.
"He fell down a little bit after the first set," Nalbandian said. "And I played better and better and better."
Nalbandian, who saved two match points in his opening match to beat Paul Goldstein, advanced to the fourth round at Key Biscayne for the first time in six appearances. Nalbandian is 10-2 this year despite missing several weeks with an abdominal injury.
"I feel good," Nalbandian said. "I think I'm ready to keep going."
No. 5 Nikolay Davydenko rallied to beat No. 25 Marcos Baghdatis 2-6, 6-2, 7-5. Baghdatis, the Australian Open runner-up, double-faulted three times in the final game.
Davydenko next plays No. 22 Marcio Ancic, who hit 17 aces and lost only 11 first-serve points while beating Florent Serra 7-6 (4), 6-7 (11), 6-2.
No. 15 Radek Stepanek hit 19 aces and played 3 hours, 10 minutes to beat Nicolas Massu 6-7 (6), 7-6 (5), 7-5.